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US 11,666,993 B2Granted
Nickel-carbon and nickel-cobalt-carbon brazes and brazing processes for joining ceramics and metals and semiconductor processing and industrial equipment using same
AssigneeWatlow Electric Manufacturing Company
InventorsAlfred Grant Elliot, Brent Elliot
Life of this patent
Estimating the term…
Abstract
A brazing process using Nickel(Ni)-Carbon as graphite(Cg) alloys, Ni-Cg-Molybdenum(Mo) alloys, and Ni-Cobalt(Co)-Cg-Mo alloys for brazing together ceramics, ceramics to metals, metals to metals. Semiconductor processing equipment made with the use of Ni-Cg alloys, such as heaters and chucks. Semiconductor processing equipment components and industrial equipment components using a highly wear resistant surface layer, such as sapphire, joined to a substrate such as a ceramic, with a Ni-Cg alloy braze.
Claims14
A joining method, said method comprising the steps of:
- placing a brazing element between an interface area of a first ceramic piece and an interface area of a second ceramic piece to create a joining pre-assembly, wherein said brazing element consists of 3.5 to 25 atomic percent of Carbon, 63.5 to 87.5 atomic percent of one or more elements from the group consisting of Iron, Cobalt, and Nickel, and greater than 0 and up to 35 atomic percent of one or more elements from the group consisting of Ti, Zr, Hf, Nb, CR, Mo, W, and Si;
- placing the components of said joining pre-assembly into a process chamber;
- removing oxygen from said process chamber;
- and heating at least said brazing element of said joining pre-assembly, thereby joining said first ceramic piece to said second ceramic piece.
1 more element
Dependencies are inferred from the claim text.