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US 11,664,251 B2Granted
Systems and methods for a spray measurement apparatus
AssigneeShellback Semiconductor Technology, LLC
InventorsDarren O'Reilly, Christian Forgey, Joshua Levinson, Jeff Garbacik, Alexander Trufanov, Robert Kraiger, David Brady
Life of this patent
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Abstract
Various embodiments of a spray measurement system having a jig device that allows measuring spray output of one or more spray nozzles and determine spray distribution patterns of the spray nozzles are disclosed.
Claims20
A spray measurement apparatus, comprising:
- a casing defining a top portion, a bottom portion, and opposing first and second side portions, wherein the top portion forms a top opening to an upper chamber wherein the top portion is connected to the lower portion where the lower portion comprises a tank, wherein the tank contains a plurality of channels;
- a jig device disposed within the upper chamber, the jig device comprising:
- a slot assembly comprising:
- a plurality of slot plates interposed between a plurality of slot blocks for defining respective slots provided to insert objects to be sprayed;
- and
- a plurality of blocker plates where each blocker plate is be disposed within a respective slot of the slot assembly to block the spray from entering a slot, and wherein a respective slot is associated with one of the plurality of the lower portion tank channels such that a liquid sprayed by one or more spray nozzles at a respective unblocked slot is collected at one of the plurality of channels;
- a plurality of pressure transducers in operative communication with the plurality of channels for measuring the spray output of the one or more spray nozzles at a respective slot in which at least one blocker plate has been removed, wherein each respective channel is associated with a respective one of the plurality of pressure transducers;
- and
- a data collection interface in operative communication with the plurality of pressure transducers for measuring the amount of liquid collected in the plurality of channels.
6 more elements
A spray measurement system, comprising:
- a spray measurement apparatus, comprising:
- a casing defining a top portion, a bottom portion, and opposing first and second side portions, wherein the top portion forms a top opening to an upper chamber wherein the top portion is connected to the lower portion where the lower portion comprises a tank, wherein the tank contains a plurality of channels;
- a jig device disposed within the upper chamber, the jig device comprising:
- a slot assembly comprising:
- a plurality of slot plates interposed between a plurality of slot blocks for defining respective slots provided to insert objects to be sprayed;
- and
- a plurality of blocker plates where each blocker plate is disposed within a respective slot of the slot assembly to block the spray from entering the slot, and wherein a respective slot is associated with one of the plurality of the lower portion tank channels such that a liquid sprayed by one or more spray nozzles at a respective unblocked slot is collected at one of the plurality of channels;
- a plurality of pressure transducers in operative communication with the plurality of channels for measuring the spray output of the one or more spray nozzles at a respective slot in which at least one blocker plate has been removed, wherein each respective channel is associated with a respective one of the plurality of pressure transducers;
- and
- a data collection interface in operative communication with the plurality of pressure transducers for measuring the amount of liquid collected in the plurality of channels;
- a rotor disposed within a batch chemical processing chamber and operatively engaged with the spray measurement apparatus, wherein the rotor is operable to rotate around a horizontal axis Z and wherein the rotor is operable to rotate in a clockwise or counterclockwise direction A and an opposite clockwise or counterclockwise direction B;
- and
- a controller in operative association with the rotor, wherein the controller is operable to rotate the rotor around the horizontal axis Z, wherein the controller is operable to rotate the rotor in the clockwise or counterclockwise direction A and the opposite clockwise or counterclockwise direction B between the vertical resting position and a predetermined testing angle;
- wherein the spray measurement apparatus is operable to be rotated to the predetermined testing angle by the rotor and receive an amount of liquid sprayed by a spray nozzle array into the one or more of the channels and wherein the data collection interface is operable to record the amount of liquid collected in each of the one or more channels.
11 more elements
Dependencies are inferred from the claim text.