Substrate processing apparatus and controller

A substrate processing apparatus, comprising an operation part configured to operate a screen control part, a collection part, a determination part, and a calculation part,

• wherein the screen control part is configured to display, on a display part, a maintenance component management screen displaying one or more components, one or more mechanisms, or both, which are selected as management targets from components constituting the apparatus, mechanisms configured with a plurality of components, or both, as maintenance components,
• wherein the collection part is configured to collect component data related to each of the maintenance components,
• wherein the determination part is configured to, for each of the maintenance components, compare a cumulative value of the component data with a predetermined threshold value to determine whether the cumulative value exceeds the predetermined threshold value,
• wherein the calculation part is configured to repeatedly perform:
• calculating an average value of a plurality of average values of the component data for a predetermined period, each of the plurality of average values of the component data being obtained for a predetermined cycle;
• calculating an expected value of a cumulative value of the component data based on the average value of the plurality of average values of the component data;
• and
• calculating replacement times estimated for replacing the maintenance components, respectively, by determining the expected value of the cumulative value of the component data exceeds a predetermined threshold value of the component data,
• wherein the operation part is configured to:
• cause the calculation part to calculate the replacement times;
• cause the screen control part to display, on the display part, the maintenance component management screen displaying the maintenance components sequentially from a maintenance component having an earliest replacement time among the calculated replacement times to a maintenance component having a latest replacement time among the calculated replacement times;
• and
• cause the screen control part to display, on the display part, each of the maintenance components and the component data related thereto, which are updated for each predetermined cycle, and
• wherein the act of calculating the average value of the plurality of average values of the component data for the predetermined period includes:
• calculating a first average value of a first set of average values of the component data for a first predetermined period;
• and
• calculating a second average value of a second set of average values of the component data for a second predetermined period, the second set of average values partially overlapping the first set of average values.