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US 11,658,015 B2Granted
Ceramic structure, electrostatic chuck and substrate fixing device
AssigneeShinko Electric Industries Co., Ltd.
InventorTomotake Minemura
Life of this patent
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Abstract
A ceramic structure includes a base body, and a thermoelectric device having a part in directly contact with the base body. The base body is a ceramic consisting of aluminum oxide. The thermoelectric device comprises a conductor part that is a sintered body having an alloy of tungsten and rhenium, as a main component, and including nickel oxide, aluminum oxide and silicon dioxide.
Claims15
A ceramic structure comprising:
- a base body;
- and
- a thermoelectric device having a part in directly contact with the base body,
- wherein the base body is a ceramic consisting of aluminum oxide, and
- wherein the thermoelectric device comprises a conductor part that is a sintered body having an alloy of tungsten and rhenium, as a main component, and including nickel oxide, aluminum oxide and silicon dioxide.
2 more elements
Dependencies are inferred from the claim text.