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US 11,658,003 B2Granted
Method for producing phosphor panel, phosphor panel, image intensifier and scanning-type electronic microscope
AssigneeHamamatsu Photonics K.K.
InventorsYasumasa Hamana, Hiroyuki Watanabe, Kenshi Shimano, Hiroji Nishizawa
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Abstract
A method of manufacturing a phosphor panel includes: forming a phosphor layer having a plurality of phosphor particles on an exit window; forming an organic film on the phosphor layer; forming a metal reflection film on the organic film; forming an oxide film on the metal reflection film; removing the organic film by firing; and forming an oxide film integrally covering a surface of the metal reflection film and surfaces of the phosphor particles by atomic layer deposition.
Claims13
A method of manufacturing a phosphor panel, comprising:
- forming a phosphor layer having a plurality of phosphor particles on a light transmissive substrate;
- forming an organic film on the phosphor layer;
- forming a metal reflection film on the organic film;
- removing the organic film by firing;
- forming an oxide film integrally covering a surface of the metal reflection film and surfaces of the phosphor particles by atomic layer deposition.
2 more elements
A phosphor panel, comprising:
- a light transmissive substrate;
- a phosphor layer disposed on the light transmissive substrate and having a plurality of phosphor particles;
- a metal reflection film disposed on the phosphor layer;
- an oxide film integrally covering a surface of the metal reflection film and surfaces of the phosphor particles.
1 more element
Dependencies are inferred from the claim text.