Lithographic apparatus and illumination uniformity correction system
AssigneesASML Holding N.V., ASML Netherlands B. V.
InventorsJanardan Nath, Kalyan Kumar Mankala, Todd R. Downey, Joseph Harry Lyons, Ozer Unluhisarcikli, Alexander Harris Ledbetter, Nicholas Stephen Apone, Tian Gang
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Abstract
An illumination adjustment apparatus, to adjust a cross slot illumination of a beam in a lithographic apparatus, includes a plurality of fingers to adjust the cross slot illumination to conform to a selected intensity profile. Each finger has a distal edge that includes at least two segments. The two segments form an indentation of the distal edge.
Claims20
An illumination adjustment apparatus to adjust a cross slot illumination of a beam in a lithographic apparatus, the illumination adjustment apparatus comprising:
- a plurality of fingers configured to adjust the cross slot illumination to conform to a selected intensity profile,
- wherein each finger has a distal edge comprising at least two segments, and
- wherein the at least two segments form an indentation of the distal edge such that there is a portion of the indentation nearer a middle of the cross slot illumination on either side of the indentation, and
- wherein at least part of the distal edge aligns with a part of the shape of the cross slot illumination at the respective finger.
A uniformity correction system to adjust a cross slot illumination of a scanning beam in a lithographic apparatus, the uniformity correction system comprising:
- a plurality of fingers configured to adjust the cross slot illumination to conform to a selected intensity profile,
- wherein each finger has a distal edge comprising at least two teeth and at least part of the distal edge aligns with a part of the shape of the cross slot illumination at the respective finger.
An illumination adjustment apparatus to adjust a cross slot illumination of a beam in a lithographic apparatus, the illumination adjustment apparatus comprising:
- a plurality of fingers configured to adjust the cross slot illumination to conform to a selected intensity profile,
- wherein each finger has distal edge arranged to be in the illumination and has, at the distal edge, a protrusion[[s]] such that there is a portion of the protrusion nearer a middle of the cross slot illumination than on either side of the protrusion or an indentation such that there is a portion of the indentation nearer the middle of the cross slot illumination on either side of the indentation, and
- wherein at least part of the distal edge aligns with a part of the shape of the cross slot illumination at the respective finger.
Dependencies are inferred from the claim text.