Excimer lamp and ultraviolet light irradiation device
AssigneeUshio Denki Kabushiki Kaisha
InventorHideaki Yagyu
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Abstract
An excimer lamp includes light-emitting gases containing krypton gas and chlorine gas in a sealing body composed of fused quartz glass having an absorption band at least in a wavelength band of 240 nm to 260 nm. An ultraviolet light irradiation device includes: an excimer lamp having light-emitting gases containing krypton gas and chlorine gas in a sealing body; a housing having an extraction part for extracting ultraviolet light emitted from an excimer lamp; and fused quartz glass disposed in the extraction part and having an absorption band at least in a wavelength band of 240 nm to 260 nm.
Claims20
An excimer lamp comprising:
- a sealing body including fused quartz glass having an absorption band at least in a wavelength band of 240 nm to 260 nm;
- and
- light-emitting gases sealed in an inside of the sealing body, the light-emitting gases containing krypton gas and chlorine gas.
An ultraviolet light irradiation device comprising:
- an excimer lamp containing krypton gas and chlorine gas as light-emitting gases in a sealing body;
- a housing that accommodates the excimer lamp and includes an extraction part that is configured to extract ultraviolet light to be emitted from the excimer lamp;
- and
- fused quartz glass disposed in the extraction part and having an absorption band at least in a wavelength band of 240 nm to 260 nm.
Dependencies are inferred from the claim text.