Method of producing microrods for electron emitters, and associated microrods and electron emitters
AssigneeFEI Company
InventorsKun Liu, Chad Rue, Alan Stephen Bahm
Life of this patent
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AssigneeFEI Company
InventorsKun Liu, Chad Rue, Alan Stephen Bahm
Estimating the term…
Methods of producing microrods for electron emitters and associated microrods and electron emitters. In one example, a method of producing a microrod for an electron emitter comprises providing a bulk crystal ingot, removing a first plate from the bulk crystal ingot, reducing a thickness of the first plate to produce a second plate, and milling the second plate to produce one or more microrods. In another example, a microrod for an electron emitter comprises a microrod tip region that comprises a nanoneedle that in turn comprises a nanorod and a nanoprotrusion tip. The microrod and the nanoneedle are integrally formed from a bulk crystal ingot by sequentially: (i) removing the microrod from the bulk crystal ingot; (ii) coarse processing the microrod tip region to produce the nanorod; and (iii) fine processing the nanorod to produce the nanoprotrusion tip.
A method of producing a microrod for an electron emitter, the method comprising:
A microrod for an electron emitter, comprising:
Dependencies are inferred from the claim text.