Purification method of high-purity n-tetrasilane
AssigneeTaiwan Speciality Chemicals Corporation
InventorsSung-Yueh Shieh, Teng-Chih Lee
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Abstract
A high-purity n-tetrasilane purification method includes: introducing a tetrasilane (Si4H10) isomeric mixture into a solidifying purification tank, cooling the tetrasilane (Si4H10) to a predetermined temperature with refrigerant in the solidifying purification tank, maintaining the predetermined temperature between the freezing temperature of the n-tetrasilane (n-Si4H10) and of the i-tetrasilane (i-Si4H10), solidifying the n-tetrasilane (n-Si4H10) in the tetrasilane (Si4H10) isomeric mixture into solid state, and vacuuming the i-tetrasilane (i-Si4H10) from the mixture for separation.
Claims8
A purification method for high-purity n-tetrasilane comprising:
- introducing a tetrasilane (Si4H10) isomeric mixture into a solidifying purification tank,
- cooling the tetrasilane (Si4H10) isomeric mixture to a predetermined temperature by flowing a refrigerant through a jacket of the solidifying purification tank,
- maintaining the predetermined temperature between the freezing temperature of n-tetrasilane (n-Si4H10) and the freezing temperature of i-tetrasilane (i-Si4H10) to freeze the n-tetrasilane (n-Si4H10) into a solid form within the tetrasilane (Si4H10) isomeric mixture, and
- removing liquid i-tetrasilane (i-Si4H10) in the tetrasilane (Si4H10) isomeric mixture.
Dependencies are inferred from the claim text.