Imprint apparatus, imprint method, and method of manufacturing article

A method of manufacturing an article, the method comprising steps of:

• forming a material on a substrate using a mold;
• supplying the material to the substrate by a material supply unit;
• supplying a gas from a gas supply unit toward the substrate to form an air curtain surrounding the mold, wherein the gas supply unit is provided so as to surround the mold when an apparatus having a mold holding unit to hold the mold for forming the material on the substrate is viewed from above;
• moving the substrate between a material supply position facing the material supply unit and a contact position facing the mold;
• and
• adjusting a flow rate of the gas blown out from at least a part of the gas supply unit such that the flow rate from said at least a part of the gas supply unit when the substrate to which the material has been supplied passes directly under the gas supply unit is smaller than the flow rate from said at least a part of the gas supply unit when the substrate is located in the contact position facing the mold;
• and
• processing the substrate on which the material is formed after the step of forming the material.