Ion milling for frequency tuning of superconducting qubits
AssigneeInternational Business Machines Corporation
InventorsMatthias Mergenthaler, Andreas Fuhrer Janett, Stephan Paredes, Peter Mueller
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Abstract
A method of modifying a resonant frequency of a quantum device includes generating an ion beam having a beam energy and exposing a surface of the quantum device to the ion beam for an exposure time. The ion beam is incident onto the quantum device at an oblique angle that is less than 90 degrees as measured from the surface of the quantum device. The quantum device includes a Josephson junction, the ion beam exposing the quantum device proximate to the Josephson junction to modify a property of the Josephson junction, the property being associated with the resonant frequency of the quantum device.
Claims20
A method, comprising:
- modifying, using ion milling, a resonant frequency of a quantum device to a defined resonant frequency, the modifying comprising
- generating an ion beam having a beam energy selected for the ion milling;
- and
- exposing a surface of the quantum device to the ion beam for an exposure time, wherein the ion beam is incident onto the quantum device at an oblique angle that is 30 degrees, ±20 degrees as measured from the surface of the quantum device, and
- wherein the quantum device comprises a Josephson junction, and said ion beam having a focus area exposing the Josephson junction to modify a property of the Josephson junction, said property associated with the resonant frequency of the quantum device.
A method, comprising:
- modifying, using ion milling, a resonant frequency of a transmon qubit device to a defined resonant frequency, the modifying comprising
- generating an ion beam having a beam energy selected for the ion milling;
- and
- exposing a surface of the transmon qubit device to the ion beam for an exposure time,
- wherein the ion beam is incident onto the transmon qubit device at an oblique angle that is 30 degrees, ±20 degrees as measured from the surface of the transmon qubit device, and
- wherein the transmon qubit device comprises a Josephson junction, and said ion beam having a focus area exposing the Josephson junction to modify a property of the Josephson junction, said property associated with the resonant frequency of the transmon qubit device.
Dependencies are inferred from the claim text.