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US 11,641,739 B2Granted
Semiconductor non-volatile memory devices
AssigneeGlobalfoundries Singapore Pte. Ltd.
InventorsYongshun Sun, Eng Huat Toh, Shyue Seng Tan, Xinshu Cai, Lanxiang Wang
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Abstract
A memory device is provided. The memory device includes an active region in a substrate, an electrically-isolated electrode, and a dielectric layer. The electrically-isolated electrode is disposed over the active region. The dielectric layer is disposed between the electrically-isolated electrode and the active region and has a first dielectric portion having a first thickness and a second dielectric portion having a second thickness.
Claims12
A memory device comprising:
- a substrate having a first active region and a second active region laterally spaced from the first active region;
- an isolation region between the first active region and the second active region;
- a first electrically-isolated electrode over the first active region, wherein the first electrically-isolated electrode has a first portion of a first electrode thickness and a second portion of a second electrode thickness that is greater than the first electrode thickness, and the first portion and the second portion have substantially coplanar upper surfaces;
- a second electrically-isolated electrode over the second active region, wherein the second electrically-isolated electrode has an electrode thickness equal to the second electrode thickness of the first electrically-isolated electrode and forms a floating gate with the first electrically-isolated electrode for the memory device;
- and
- a dielectric layer directly under the first electrically-isolated electrode and the second electrically-isolated electrode, wherein the dielectric layer has a first dielectric portion having a first dielectric thickness directly under the first portion of the first electrically-isolated electrode and a second dielectric portion having a second dielectric thickness directly under the second portion of the first electrically-isolated electrode and the second electrically-isolated electrode, the second dielectric thickness is thinner than the first dielectric thickness.
3 more elements
Dependencies are inferred from the claim text.