US 11,640,891 B2 · Mems switch with multiple pull-down electrodes between terminal electrodes

Abstract

The disclosure is directed to microelectromechanical system (MEMS) switches with multiple pull-down electrodes between terminal electrodes to limit off-state capacitance. In exemplary aspects disclosed herein, a plurality of pull-down electrodes are positioned between the input terminal electrode and the output terminal electrode. The plurality of pull-down electrodes are offset from each other to limit off-state capacitance between the input terminal electrode and the output terminal electrode. The separation between the pull-down electrodes disrupts the off-state capacitive path between the input terminal electrode and the output terminal electrode, thereby further insulating the contacts from each other. Limiting off-state capacitance reduces on-state electrical loss and increases off-state electrical isolation for improved performance.

Claims20

Dependent claims

A microelectromechanical system (MEMS) switch, comprising:

an input electrode;
an output electrode;
a first set of pull-down electrodes comprising a first interior electrode and a first exterior electrode positioned on opposite sides of the input electrode;
a second set of pull-down electrodes comprising a second interior electrode and a second exterior electrode positioned on opposite sides of the output electrode;
a beam element configured to move between:
an on position adjacent to the first set of pull-down electrodes and the second set of pull-down electrodes to electrically couple the input electrode and the output electrode to the beam element;
and
an off position away from the first set of pull-down electrodes and the second set of pull-down electrodes to electrically isolate the input electrode and the output electrode from the beam element;
wherein the first interior electrode and the second interior electrode are offset from each other to limit off state capacitance between the input electrode and the output electrode.

6 more elements

Dependencies are inferred from the claim text.

Mems switch with multiple pull-down electrodes between terminal electrodes

Life of this patent

Mems switch with multiple pull-down electrodes between terminal electrodes

Life of this patent

Abstract

Claims20