Back to results
US 11,639,907 B2Granted
Device for determining the dew point of a gas in a process chamber and heat treatment device having such a device for determining the dew point
AssigneeBelimed AG
InventorsDirk Ingmar Ulhenhaut, Jochen Ganz
Life of this patent
Estimating the term…
Abstract
A device (1) for determining the dew point of a gas in a process chamber (2) which comprises a temperature control element (3) and a temperature sensor (4) for determining the temperature in the process chamber (2). The temperature sensor is in a thermally conductive functional connection with the temperature control element (3), and the temperature control element (3) is designed to actively heat and cool the temperature sensor (4). The temperature sensor is arranged in direct contact with the temperature control element (3).
Claims10
A device for measuring a dew point of a gas in a process chamber comprising:
- a temperature control element, and
- a temperature sensor for determining the temperature in the process chamber,
- wherein the temperature sensor is in operative, thermally conductive connection with the temperature control element,
- wherein the temperature control element is designed for active heating and cooling of the temperature sensor, and
- the temperature sensor is in direct contact with the temperature control element, and wherein the temperature sensor is a thermocouple, wherein the device is designed to determine the dew point of the gas in the process chamber by dewing the junction site of a first conductor and of a second conductor of the thermocouple as the only dewable surface of the device.
2 more elements
Dependencies are inferred from the claim text.