Laminar flow restrictor
AssigneeIchor Systems, Inc.
InventorsSean Joseph Penley, Zachariah Ezekiel McIntyre, Tyler James Wright
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Abstract
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.
Claims16
A flow restrictor for restricting the flow of a gas, the flow restrictor comprising:
- a first end;
- a second end, a longitudinal axis extending from the first end to the second end;
- a plurality of first layers extending from the first end to the second end along the longitudinal axis;
- a plurality of second layers extending from the first end to the second end along the longitudinal axis;
- a first aperture at the first end defined by the plurality of first layers and the plurality of second layers;
- a second aperture at the second end defined by the plurality of first layers and the plurality of second layers;
- wherein a flow passage is defined by the plurality first layers and the plurality of second layers, the flow passage extending from the first aperture to the second aperture;
- and
- wherein each of the plurality of first layers comprises a first side, a second side opposite the first side, a third side, a fourth side opposite the third side, a front face, and an opposite rear face, the flow passage comprising a longitudinal passage formed into the front face of a first one of the plurality of first layers, the longitudinal passage extending from the front face of the first one of the plurality of first layers to the rear face of the first one of the plurality of first layers.
A mass flow control apparatus for delivery of a fluid, the mass flow control apparatus comprising:
- a valve comprising an inlet passage, an outlet passage, a valve seat, and a closure member;
- and
- a flow restrictor, the flow restrictor positioned in one of the inlet passage or the outlet passage, the flow restrictor comprising:
- a first end;
- a second end, a longitudinal axis extending from the first end to the second end;
- a plurality of first layers extending from the first end to the second end along the longitudinal axis;
- a plurality of second layers extending from the first end to the second end along the longitudinal axis;
- a first aperture at the first end defined by the plurality of first layers and the plurality of second layers;
- a second aperture at the second end defined by the plurality of first layers and the plurality of second layers;
- and
- a flow passage defined by the plurality of first layers and the plurality of second layers, the flow passage extending from the first aperture to the second aperture;
- wherein each of the plurality of first layers comprises a first side, a second side opposite the first side, a third side, a fourth side opposite the third side, a front face, and an opposite rear face, the flow passage comprising a longitudinal passage formed into the front face of a first one of the plurality of first layers, the longitudinal passage extending from the front face of the first one of the plurality of first layers to the rear face of the first one of the plurality of first layers.
A flow restrictor comprising:
- a first end;
- a second end, a longitudinal axis extending from the first end to the second end;
- a plurality of first layers extending from the first end to the second end along the longitudinal axis;
- a plurality of second layers extending from the first end to the second end along the longitudinal axis;
- a first aperture at the first end defined by a first one of the plurality of first layers and first and second ones of the plurality of second layers;
- a second aperture at the second end defined by the first one of the plurality of first layers and the first and second ones of the plurality of second layers;
- and
- a flow passage extending from the first aperture to the second aperture.
Dependencies are inferred from the claim text.