Massively-parallel micronozzle array for direct write electrodeposition of high-density microstructure arrays
AssigneeIntel Corporation
InventorsJoe Walczyk, Pooya Tadayon, Andrew Hoitink, Tanner Schulz
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Abstract
A micronozzle assembly, comprising a reservoir, an array of structures comprising micronozzles, a porous structure positioned between the reservoir and the array, and an electrode within the reservoir, wherein the electrode comprises any of a mesh, a frame along the perimeter of the cavity of the reservoir, or a rod extending into a cavity of the reservoir.
Claims18
A microelectrodeposition assembly for parallel direct writing of a two-dimensional (2D) array of discrete metal microstructures, the assembly comprising:
- an electrolyte reservoir comprising a cavity surrounded by a wall, wherein a bottom of the electrolyte reservoir comprises a porous structure;
- a 2D array of structures comprising micronozzles in fluid communication with the electrolyte reservoir through the porous structure, wherein the 2D array of structures comprises at least 10,000 micronozzles having a center-to-center pitch substantially equal to a center-to-center pitch of individual ones of the 2D array of discrete metal microstructures to be deposited in parallel by corresponding individual ones of the micronozzles;
- and
- an electrode within the electrolyte reservoir, wherein the electrode is separated from the 2D array of structures by the porous structure and wherein the electrode comprises any of a mesh, a frame along a perimeter of the cavity of the electrolyte reservoir, or a rod extending into the cavity of the electrolyte reservoir.
A microelectrodeposition system for parallel direct writing of a two-dimensional (2D) array of discrete metal microstructures, the system, comprising:
- a micronozzle assembly, comprising:
- an electrolyte reservoir coupled to a fluid path, wherein the electrolyte reservoir comprises a cavity surrounded by a wall and a bottom of the electrolyte reservoir comprises a porous structure;
- a 2D array of structures comprising between 10,000 and 1,500,000 micronozzles in fluid communication with the electrolyte reservoir through the porous structure, the micronozzles having a center-to-center pitch of 100 microns or less and substantially equal to a center-to-center pitch of individual ones of the 2D array of discrete metal microstructures to be deposited in parallel by corresponding individual ones of the micronozzles;
- an electrode within the electrolyte reservoir, wherein the electrode is separated from the 2D array of structures by the porous structure and wherein the electrode comprises any of a mesh, a frame along a perimeter of the cavity of the electrolyte reservoir, or a rod extending into the cavity of the electrolyte reservoir;
- a power source coupled to the electrode;
- and
- a motion actuator to displace the micronozzle assembly vertically relative to the 2D array of microstructures during the direct writing.
Dependencies are inferred from the claim text.