Back to results
US 11,638,376 B2Granted
Electronic device having self-aligned contacts
AssigneeApplied Materials, Inc.
InventorRussell Chin Yee Teo
Life of this patent
Estimating the term…
Abstract
Electronic devices and methods of forming electronic devices using a reduced number of hardmask materials and reusing lithography reticles are described. Patterned substrates are formed using a combination of etch selective hardmask materials and reusing reticles to provide a pattern of repeating trapezoidal and rhomboidal openings.
Claims9
An electronic device comprising:
- a plurality of spaced wordlines defining a third direction, each of the wordlines spaced from adjacent wordlines by a dielectric;
- a plurality of substrate islands within the dielectric between the wordlines, the substrate islands extending in a first direction, second direction and third direction, the substrate islands comprising trapezoid-like shaped islands (TI), right-facing rhombus-like islands (RFI) and left-facing rhombus-like islands (LFI) arranged in repeating patterns along the first direction, the second direction and the third direction, the first direction and the third direction, the islands form a repeating pattern of TI, RFI and LFI, along the second direction, the islands appearing as a line of single type to have a line of TI, a line of RFI and a line of LFI.
Dependencies are inferred from the claim text.