Joined body and elastic wave element
AssigneeNGK Insulators, Ltd.
InventorsMasashi Goto, Tomoyoshi Tai, Mai Minoura
Life of this patent
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Abstract
A bonded body having a supporting substrate and piezoelectric material layer is provided. The supporting substrate is composed of mullite, and the material of the piezoelectric material layer is LiAO3 where A represents one or more element selected from the group consisting of niobium and tantalum. An interface layer is present along an interface between the supporting body and piezoelectric material layer, and a supporting substrate-side intermediate layer is present between the interface layer and supporting substrate. Each of the interface layer and supporting substrate-side intermediate layer contains oxygen, aluminum, silicon and one or more element selected from the group consisting of niobium and tantalum as main components.
Claims10
A bonded body comprising a supporting substrate and a piezoelectric material layer, said supporting substrate comprising mullite, and said piezoelectric material layer comprising a material comprising LiAO3 where A represents one or more element selected from the group consisting of niobium and tantalum;
- wherein said bonded body comprises an interface layer present along an interface between said supporting substrate and said piezoelectric material layer and a supporting substrate-side intermediate layer present between said interface layer and said supporting substrate;
- and
- wherein each of said interface layer and said supporting substrate-side intermediate layer comprises a material containing all of oxygen, aluminum, silicon and one or more element selected from the group consisting of niobium and tantalum as main components.
Dependencies are inferred from the claim text.