US 11,637,409 B2 · Semiconductor light-emitting module and control method therefor

Abstract

A semiconductor light-emitting module according to the present embodiment includes a plurality of semiconductor light-emitting elements each outputting light of a desired beam projection pattern; and a support substrate holding the plurality of semiconductor light-emitting elements. Each of the plurality of semiconductor light-emitting elements includes a phase modulation layer configured to form a target beam projection pattern in a target beam projection region. The plurality of semiconductor light-emitting elements include first and second semiconductor light-emitting elements that are different in terms of at least any of a beam projection direction, the target beam projection pattern, and a light emission wavelength.

A semiconductor light-emitting module comprising:

a plurality of semiconductor light-emitting elements each having a first surface from which light is outputted and a second surface opposing the first surface;
and
a support substrate having a third surface, a fourth surface opposing the third surface, and a plurality of drive electrodes respectively corresponding to the plurality of semiconductor light-emitting elements, the plurality of drive electrodes arranged on the third surface, the support substrate on which the plurality of semiconductor light-emitting elements are mounted on the third surface in a state where the second surfaces of the plurality of semiconductor light-emitting elements and the third surface face each other with the plurality of drive electrodes interposed therebetween,
wherein each of the plurality of semiconductor light-emitting elements includes:
an active layer positioned between the first surface and the second surface;
a phase modulation layer positioned between the first surface and the second surface and optically coupled to the active layer, the phase modulation layer including a base region having a first refractive index and a plurality of modified refractive index regions each of which is provided in the base region and has a second refractive index different from the first refractive index;
a first cladding layer arranged on a side where the first surface is positioned with respect to a stacked structure including at least the active layer and the phase modulation layer;
a second cladding layer arranged on a side where the second surface is positioned with respect to the stacked structure;
a first-surface-side electrode arranged on a side where the first surface is positioned with respect to the first cladding layer;
and
a second-surface-side electrode arranged on a side where the second surface is positioned with respect to the second cladding layer, the second-surface-side electrode connected to a corresponding drive electrode among the plurality of drive electrodes,
each of the plurality of modified refractive index regions is arranged at a predetermined position in the base region according to an arrangement pattern, configured to make a beam projection pattern, which is a projection pattern of light outputted from the first surface when a drive current is supplied from the corresponding drive electrode, and a beam projection region, which is a projection range of the beam projection pattern, coincide with a target beam projection pattern and a target beam projection region, respectively,
in a state that a virtual square lattice constituted by M1 (an integer of one or more)×N1 (an integer of one or more) unit configuration regions R each having a square shape is set on an X-Y plane in an XYZ orthogonal coordinate system defined by a Z-axis coinciding with a normal direction of the first surface and the X-Y plane, which includes X and Y axes orthogonal to each other and coincides with one surface of the phase modulation layer including the plurality of modified refractive index regions,
the arrangement pattern is defined such that a gravity center G1 of the modified refractive index region positioned in a unit configuration region R(x, y) is separated from a lattice point O(x, y) as a center of the unit configuration region R(x, y) by a distance r in the unit configuration region R(x, y) on the X-Y plane, specified by a coordinate component x (an integer of one or more and M1 or less) in an X-axis direction and a coordinate component y (an integer of one or more and N1 or less) in a Y-axis direction, and a vector from the lattice point O(x, y) to the gravity center G1 is directed in a specific direction,
the plurality of semiconductor light-emitting elements include a first semiconductor light-emitting element and a second semiconductor light-emitting element which are different from each other in terms of at least any of a beam projection direction that defines a traveling direction of light toward the target beam projection region, the target beam projection pattern, and a light emission wavelength,
in such a state that the phase modulation layer satisfies the following first to seventh conditions:
the first condition defined such that a lattice constant of the virtual square lattice is a, the distance r satisfies 0<r≤0.3a;
the second condition defined such that coordinates (x, y, z) in the XYZ orthogonal coordinate system satisfy relationships represented by following Formulas (1) to (3) with respect to spherical coordinates (d1, θtilt, θrot) defined by a length d1 of a radius vector, a tilt angle θtilt from the Z-axis, and a rotation angle θrot from the X-axis specified on the X-Y plane:
x=d1 sin θtilt cos θrot (1)
y=d1 sin θtilt sin θrot (2)
z=d1 cos θtilt (3);
the third condition defined such that a target beam projection pattern is a set of bright spots directed in directions defined by the angles θtilt and θrot, the angles θtilt and θrot are converted to a coordinate value kx, which is a normalized wave number defined by a following Formula (4), on a Kx-axis corresponding to the X-axis and a coordinate value ky which is a normalized wave number defined by a following Formula (5), on a Ky-axis corresponds to the Y-axis and orthogonal to the Kx-axis:
k
x
=
a
λ
⁢
sin
⁢
⁢
θ
tilt
⁢
cos
⁢
⁢
θ
rot
(
4
)
k
y
=
a
λ
⁢
sin
⁢
⁢
θ
tilt
⁢
sin
⁢
⁢
θ
rot
(
5
)
a:
Lattice constant of virtual square lattice
λ:
Oscillation wavelength;
the fourth condition defined such that a specific wave number range including the target beam projection pattern is constituted by M2 (an integer of one or more)×N2 (an integer of one or more) image regions FR each having a square shape in a wave number space defined by the Kx-axis and the Ky-axis;
the fifth condition defined such that a complex amplitude F(x, y), which is obtained by two-dimensional inverse Fourier transform of each image region FR(kx, ky), specified by the coordinate component kx (an integer of from 0 to M2−1) in the Kx-axis direction and the coordinate component ky (an integer of from 0 to N2−1) in the Ky-axis direction, to the unit configuration region R(x, y) on the X-Y plane in the wave number space, is given by a following Formula (6) with j as an imaginary unit:
F
⁡
(
x
,
y
)
=
∑
k
x
=
0
M
⁢
⁢
2
-
1
⁢
∑
k
y
=
0
N
⁢
⁢
2
-
1
⁢
FR
⁡
(
k
x
,
k
y
)
⁢
exp
⁡
[
j
⁢
⁢
2
⁢
π
⁡
(
k
x
M
⁢
⁢
2
⁢
x
+
k
y
N
⁢
⁢
2
⁢
y
)
]
;
(
6
)
the sixth condition defined such that the complex amplitude F(x, y) is defined by a following Formula (7) when an amplitude term is A(x, y) and a phase term is P(x, y) in the unit configuration region R(x, y);
F(x,y)=A(x,y)×exp[jP(x,y)] (7);
and
the seventh condition defined such that the unit configuration region R(x, y) is defined by an s-axis and a t-axis which are parallel to the X-axis and the Y-axis and orthogonal to each other at the lattice point O(x, y),
the phase modulation layer is configured such that the corresponding modified refractive index region, which satisfies a relationship that an angle φ(x, y) formed by a line segment connecting the lattice point O(x, y) and the gravity center G1 of the corresponding modified refractive index region and the s-axis is
φ(x,y)=C×P(x,y)+B
(C:
a proportional constant,
B:
an arbitrary constant),
is arranged inside the unit configuration region R(x,y).

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Semiconductor light-emitting module and control method therefor

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Semiconductor light-emitting module and control method therefor

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Abstract

Claims16