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US 11,637,232 B2Granted
Acoustic wave device including Li2CO3 layer on piezoelectric substrate made of LiNbO3 or LiTaO3
AssigneeMurata Manufacturing Co., Ltd.
InventorsTakashi Osawa, Masaki Tsutsumi, Masahiro Fukushima
Life of this patent
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Abstract
An acoustic wave device includes a piezoelectric substrate made of LiNbO3 or LiTaO3 and including first and second main surfaces that face each other, a functional electrode provided on the first main surface of the piezoelectric substrate to excite acoustic waves, and a Li2CO3 layer provided on the second main surface of the piezoelectric substrate.
Claims14
An acoustic wave device comprising:
- a piezoelectric substrate made of LiNbO3 or LiTaO3 and including first and second main surfaces that face each other;
- a functional electrode provided on the first main surface of the piezoelectric substrate to excite acoustic waves;
- and
- a Li2CO3 layer provided on the second main surface of the piezoelectric substrate.
1 more element
Dependencies are inferred from the claim text.