FinFET isolation structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChe-Cheng Chang, Chih-Han Lin, Horng-Huei Tseng
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Abstract
A device includes a semiconductive substrate, a semiconductive fin, a stop layer, a fin isolation structure, and a spacer. The semiconductive fin is over the substrate. The stop layer is between the semiconductive substrate and the semiconductive fin. The fin isolation structure is in contact with the semiconductor fin and over the stop layer. A topmost surface of the fin isolation structure is higher than a topmost surface of the semiconductive fin. The spacer at least partially extends along a sidewall of the fin isolation structure.
Claims20
A device, comprising:
- a semiconductive substrate;
- a semiconductive fin over the substrate;
- a stop layer between the semiconductive substrate and the semiconductive fin;
- a fin isolation structure in contact with the semiconductor fin and over the stop layer, wherein a topmost surface of the fin isolation structure is higher than a topmost surface of the semiconductive fin;
- and
- a spacer at least partially extending along a sidewall of the fin isolation structure.
A device, comprising:
- a semiconductive substrate;
- first and second semiconductive fins over the substrate;
- a stop layer between the semiconductive substrate and the first semiconductive fin;
- a fin isolation structure between the first and second semiconductive fins;
- and
- a spacer in contact with a sidewall of the fin isolation structure and spaced apart from the stop layer.
A device, comprising:
- a semiconductive substrate;
- a stop layer over the semiconductive substrate;
- first and second epitaxial structures over the stop layer;
- a fin isolation structure between the first and second epitaxial structures, wherein a topmost surface of the fin isolation structure is higher than a topmost surface of the first epitaxial structure;
- and
- a spacer between the first epitaxial structure and the fin isolation structure.
Dependencies are inferred from the claim text.