Integrated circuit device and method of manufacturing the same

An integrated circuit device comprising:

• a lower electrode arranged on a substrate, the lower electrode including
• a first lower electrode portion extending in a first direction perpendicular to a top surface of the substrate and including a first main region and a first top region, the first top region above the first main region, and
• a second lower electrode portion extending in the first direction on the first lower electrode portion and including a second main region and a second top region, the second top region above the second main region;
• a first top supporting pattern surrounding at least a portion of a side wall of the first top region of the first lower electrode portion;
• a first middle supporting pattern surrounding at least a portion of a side wall of the first main region of the first lower electrode portion;
• and
• a second top supporting pattern surrounding at least a portion of a side wall of the second top region of the second lower electrode portion,
• the first lower electrode portion includes a protrusion protruding outward to the first top supporting pattern, and the second lower electrode portion includes a protrusion protruding outward to the second top supporting pattern.

An integrated circuit device comprising:

• a lower electrode arranged on a substrate, the lower electrode including
• a first lower electrode portion extending in a first direction perpendicular to a top surface of the substrate, and
• a second lower electrode portion extending in a second direction on the first lower electrode portion;
• a first top supporting pattern surrounding an upper portion of a side wall of the first lower electrode portion;
• a first middle supporting pattern surrounding a portion of the side wall of the first lower electrode portion at a vertical level lower than a bottom surface of the first top supporting pattern;
• and
• a second top supporting pattern surrounding an upper portion of a side wall of the second lower electrode portion,
• the second lower electrode portion including a protrusion that is in contact with the second top supporting pattern, and
• the side wall of the first lower electrode portion including a step portion at a vertical lower than a bottom surface of the first middle supporting pattern.