Analyzing in-plane distortion

A method comprising:

• receiving a first vector map associated with manufacturing parameters of a substrate, wherein the first vector map comprises a first set of vectors each indicating a distortion of a particular location of a plurality of locations on the substrate;
• generating a second vector map comprising a second set of vectors by rotating a position of each vector in the first set of vectors, the second set of vectors each indicating a change in direction of a magnitude of the distortion of the particular location on the substrate;
• generating a third vector map comprising a third set of vectors based on a computation of vectors in the second set of vectors and corresponding vectors in the first set of vectors, the third set of vectors reflecting reduced noise in distortions across the plurality of locations on the substrate;
• and
• generating a fourth vector map by subtracting each vector of the third set of vectors from a corresponding vector in the first set of vectors, wherein the fourth vector map indicates a planar component, indicative of a direction of a sloping effect produced by stacked film on the substrate, of the first vector map.

A non-transitory computer-readable storage medium comprising instructions that, when executed by a processing device operatively coupled to a memory, performs operations comprising:

• receiving a first vector map associated with manufacturing parameters of a substrate, wherein the first vector map comprises a first set of vectors each indicating a distortion of a particular location of a plurality of locations on the substrate;
• generating a second vector map comprising a second set of vectors by rotating a position of each vector in the first set of vectors, the second set of vectors each indicating a change in direction of a magnitude of the distortion of the particular location on the substrate;
• generating a third vector map comprising a third set of vectors based on a computation of vectors in the second set of vectors and corresponding vectors in the first set of vectors, the third set of vectors reflecting reduced noise in distortions across the plurality of locations on the substrate;
• and
• generating a fourth vector map by subtracting each vector of the third set of vectors from a corresponding vector in the first set of vectors, wherein the fourth vector map indicates a planar component of the first vector map, indicative of a direction of a sloping effect produced by stacked film on the substrate, of the first vector map.