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US 11,637,033 B2Granted
Method of manufacturing protective film agent
AssigneeDisco Corporation
InventorsSenichi Ryo, Yukinobu Ohura, Hiroto Yoshida, Tomoaki Endo
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Abstract
A manufacturing method of a protective film agent for laser dicing that includes a solution preparation step of preparing a solution in which at least a water-soluble resin, an organic solvent, and an ultraviolet absorber are mixed; and an ion-exchange treatment step of carrying out ion exchange of sodium ions in the solution by using a cation-exchange resin.
Claims1
A manufacturing method of a protective film agent for laser dicing, the manufacturing method comprising:
- a solution preparation step of preparing a solution in which at least a water-soluble resin, an organic solvent, and an ultraviolet absorber are mixed;
- and
- an ion-exchange treatment step of carrying out ion exchange of sodium ions in the solution by using a cation-exchange resin.
Dependencies are inferred from the claim text.