Tape expanding apparatus

A tape expanding apparatus for expanding an expandable tape of a frame unit in which a workpiece having a plurality of division start points formed along a plurality of division lines is supported through the expandable tape to an annular frame, the tape expanding apparatus comprising:

• a frame holding unit for holding the annular frame;
• a chuck table surrounded by the frame holding unit, the chuck table having a holding surface for holding the workpiece through the expandable tape;
• a moving unit for relatively moving the chuck table and the frame holding unit in a direction perpendicular to the holding surface;
• a cassette mounting stage for mounting the cassette storing the frame unit;
• a temporary setting area for temporarily setting the frame unit drawn from the cassette;
• a transfer unit for transferring the frame unit from the temporary setting area to the chuck table;
• and
• a position adjusting unit for adjusting a position of the workpiece with respect to the holding surface;
• the position adjusting unit including
• a position detector which detects the position of the workpiece temporarily set in the temporary setting area or held on the holding surface, and
• a position control unit having an abutting unit which abuts against an outer circumference of the annular frame supported by the frame holding unit and a moving mechanism which moves the abutting unit according to the position of the workpiece detected by the position detector,
• wherein the abutting unit imparts relative movement between the annular frame and the frame holding unit in a direction parallel to an upper surface of the frame holding unit,
• wherein the frame holding unit comprises a fixing plate supported by a support table, wherein the annular fame is held therebetween.

A tape expanding apparatus for expanding an expandable tape of a frame unit in which a workpiece having a plurality of division start points formed along a plurality of division lines is supported through the expandable tape to an annular frame, the tape expanding apparatus comprising:

• a frame holding unit for holding the annular frame;
• a chuck table surrounded by the frame holding unit, the chuck table having a holding surface for holding the workpiece through the expandable tape;
• a moving unit for relatively moving the chuck table and the frame holding unit in a direction perpendicular to the holding surface;
• a cassette mounting stage for mounting the cassette storing the frame unit;
• a temporary setting area for temporarily setting the frame unit drawn from the cassette;
• a transfer unit for transferring the frame unit from the temporary setting area to the chuck table;
• and
• a position adjusting unit for adjusting a position of the workpiece with respect to the holding surface;
• the position adjusting unit including
• a position detector which detects the position of the workpiece temporarily set in the temporary setting area or held on the holding surface, and
• a position control unit having an abutting unit which abuts against an outer circumference of the annular frame supported by the frame holding unit and a moving mechanism which moves the abutting unit according to the position of the workpiece detected by the position detector,
• wherein the abutting unit imparts relative movement between the annular frame and the frame holding unit in a direction parallel to an upper surface of the frame holding unit,
• wherein the moving mechanism includes a ball screw and a pulse motor connected to the ball screw.