Multi-stage, multi-zone substrate positioning systems

A method, comprising:

• mounting a substrate on a chuck to be translated in a chamber by a first x-y translation stage and a second x-y translation stage, wherein:
• the second x-y translation stage is situated above and coupled to the first x-y translation stage;
• the chuck is situated above and coupled to the second x-y translation stage;
• x- and y-directions are substantially parallel to a surface of the chuck on which the substrate is mounted;
• a first barrier is coupled to the first x-y translation stage to separate a first zone of the chamber from a second zone of the chamber, wherein the first zone includes space above and beside the chuck and the second zone includes space beside the first x-y translation stage;
• and
• a second barrier is coupled to the second x-y translation stage to separate the first zone of the chamber from a third zone of the chamber, wherein the third zone includes space beside the second x-y translation stage;
• with the substrate mounted on the chuck in the chamber, translating the first x-y translation stage in the x- and y-directions to a first position;
• and
• with the first x-y translation stage translated to the first position, translating the second x-y translation stage in the x- and y-directions to scan a first portion of the substrate.

A method, comprising:

• coupling a first x-y translation stage to a second x-y translation stage, comprising disposing the second x-y translation stage above the first x-y translation stage;
• coupling a chuck to the second x-y translation stage, comprising disposing the chuck above the second x-y translation stage, wherein the chuck is configured to support a substrate;
• installing the chuck, first x-y translation stage, and second x-y translation stage in a chamber, wherein:
• x- and y-directions are substantially parallel to a surface of the chuck on which the substrate is to be mounted,
• the first x-y translation stage is movable in the x- and y-directions, and
• the second x-y translation stage is movable in the x- and y-directions while the first x-y translation stage is stationary;
• installing a first barrier, coupled to the first x-y translation stage, to separate a first zone of the chamber from a second zone of the chamber, wherein the first zone includes space above and beside the chuck and the second zone includes space beside the first x-y translation stage;
• and
• installing a second barrier, coupled to the second x-y translation stage, to separate the first zone of the chamber from a third zone of the chamber, wherein the third zone includes space beside the second x-y translation stage.