Deposition apparatus and deposition method using the same

A deposition method comprising:

• preparing a deposition apparatus including a shield member having a lattice shape in a plan view, the lattice shape including short side edges extending along a first direction and long side edges extending along a second direction crossing the first direction, the short side edges including a first short side edge and a second short side edge, a bracket member including a first bracket member disposed on the first short side edge and coupled to the first short side edge, and a second bracket member disposed on the second short side edge and coupled to the second short side edge, a plurality of anode bars extending along the second direction and stably placed on each of the first bracket member and the second bracket member, and a target member covering the plurality of anode bars;
• and
• arranging a substrate to face the target member in a state of being separated from the target member across the plurality of anode bars interposed therebetween,
• wherein the shield member is applied with a predetermined voltage and act as an anode for plasma generation,
• an anode bar of the plurality of anode bars protrudes outward beyond at least one of the first bracket member and the second bracket member,
• the anode bar is physically separated from the shield member by the bracket member,
• each of the anode bar and the bracket member includes an embossed pattern on a surface thereof,
• each of the first bracket member and the second bracket member includes a fixing member,
• a hole is defined in the fixing member of the first bracket member,
• a groove is defined in the fixing member of the second bracket member,
• a first end of the anode bar protrudes outward through the hole of the first bracket member not to be completely fixed to the first bracket member, and
• a second end of the anode bar is stably placed in the groove of the second bracket member.

A deposition apparatus comprising:

• a shield member having a lattice shape in a plan view, the lattice shape including short side edges extending along a first direction and long side edges extending along a second direction crossing the first direction, the short side edges including a first short side edge and a second short side edge, the shield member being applied with a predetermined voltage and acting as an anode for plasma generation;
• a bracket member including a first bracket member disposed on the first short side edge and coupled to the first short side edge, and a second bracket member disposed on the second short side edge and coupled to the second short side edge;
• a plurality of anode bars extending along the second direction and stably placed on each of the first bracket member and the second bracket member;
• and
• a target member covering the plurality of anode bars,
• wherein an anode bar of the plurality of anode bars protrudes outward beyond at least one of the first bracket member and the second bracket member, and
• the anode bar is physically separated from the shield member by the bracket member,
• wherein each of the anode bar and the bracket member includes an embossed pattern on a surface thereof,
• each of the first bracket member and the second bracket member includes a fixing member,
• a hole is defined in the fixing member of the first bracket member,
• a groove is defined in the fixing member of the second bracket member,
• a first end of the anode bar protrudes outward through the hole of the first bracket member not to be completely fixed to the first bracket member, and
• a second end of the anode bar is stably placed in the groove of the second bracket member.