Coating device for conducting high efficient low temperature coating

A coating device comprising a vacuum coating chamber for conducting vacuum coating processes, said vacuum coating chamber comprising:

• one or more lateral chamber walls;
• one or more protection shields arranged in an interior of the chamber;
• and
• one or more coating sources arranged at one of the lateral chamber walls, wherein:
• one or more of the lateral walls are cooled chamber walls having an inner side and a cooled side, one or more of the protection shields are arranged as removable shielding plates covering at least part of a surface of the inner side of one of the cooled lateral chamber walls at which one or more coating sources are arranged, wherein at least one of the removable shielding plates is placed forming a gap in relation to the surface of the inner side of the cooled lateral chamber wall that is being covered by said one or more removable shielding plates, wherein thermal conductive means are arranged filling the gap in an extension corresponding to at least a portion of a total surface of the inner side of the cooled lateral chamber wall that is being covered by the at least one removable shielding plate, wherein the thermal conductive means enable conductive heat transfer between the at least one removable shielding plate and the respectively covered part of the cooled lateral chamber wall, the thermal conductive means comprising:
• at least one shielding elevated plane arranged at a shielding contact surface on a side of the shielding plate that is facing the inner side of the respectively covered cooled chamber wall, and/or at least one wall elevated plane arranged at a wall contact surface on the inner side of the respectively covered cooled chamber wall;
• and
• a thermal bridge material filling a remainder of the gap between the shielding contact surface and the wall contact surface, that is not occupied with the shielding elevated plane and/or with the wall elevated plane, forming a thermal interface for conductive heat transfer between the shielding contact surface and the wall contact surface, wherein the thermal bridge material is a carbon foil.