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US 11,636,579 B2Granted
Information processing method, information processing apparatus and computer-readable recording medium
AssigneeTokyo Electron Limited
InventorsToyohisa Tsuruda, Masato Hosaka
Life of this patent
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Abstract
An information processing method includes obtaining information on a deformation factor of a surface of a target substrate; obtaining a surface image of the target substrate; calculating a correction coefficient for correcting an image change due to deformation of the surface, based on the information on the deformation factor of the surface; and generating a corrected image of the target substrate by correcting the surface image of the target substrate using the correction coefficient.
Claims15
An information processing method, comprising:
- obtaining information on a deformation factor of a surface of a target substrate;
- obtaining a surface image of the target substrate;
- calculating a correction coefficient for correcting an image change due to deformation of the surface, based on the information on the deformation factor of the surface, wherein calculating the correction coefficient based on the information of the deformation factor comprises calculating the correction coefficient based on a warpage coefficient, which is based on a reference substrate having a known warpage amount, and a warpage amount of the target substrate;
- generating a corrected image of the target substrate by correcting the surface image of the target substrate using the correction coefficient;
- obtaining a warpage amount of the reference substrate;
- obtaining a surface image of the reference substrate;
- and
- calculating the warpage coefficient based on the warpage amount of the reference substrate and the surface image of the reference substrate,
- wherein obtaining the information on the deformation factor of the surface comprises obtaining the warpage amount of the target substrate, and
- wherein calculating the warpage coefficient comprises:
- generating normalized data including a normalized brightness value of each pixel of the surface image of the reference substrate based on a brightness value of a central region in the surface image of the reference substrate;
- and
- calculating the warpage coefficient based on the warpage amount of the reference substrate and the normalized data.
10 more elements
An information processing apparatus, comprising:
- a memory unit configured to store a surface image of a target substrate, and information on a deformation factor of a surface of the target substrate;
- a calculation unit configured to calculate a correction coefficient for correcting an image change due to deformation of the surface image of the target substrate, based on the information on the deformation factor of the surface of the target substrate;
- and
- a generation unit configured to generate a corrected image of the target substrate by correcting the surface image of the target substrate using the correction coefficient,
- wherein the calculation unit is configured to:
- calculate the correction coefficient based on the information of the deformation factor of the surface by calculating the correction coefficient based on a warpage coefficient, which is based on a reference substrate having a known warpage amount, and a warpage amount of the target substrate, and
- calculate the warpage coefficient based on the warpage amount of the reference substrate and a surface image of the reference substrate by generating normalized data including a normalized brightness value of each pixel of the surface image of the reference substrate based on a brightness value of a central region in the surface image of the reference substrate, and calculating the warpage coefficient based on the warpage amount of the reference substrate and the normalized data.
4 more elements
A non-transitory computer-readable recording medium storing a program that causes an information processing apparatus to perform an information processing method which comprises:
- obtaining information on a deformation factor regarding deformation of a surface of a target substrate;
- obtaining a surface image of the target substrate;
- calculating a correction coefficient for correcting an image change due to deformation of the surface, based on the information on the deformation factor, wherein calculating the correction coefficient based on the information of the deformation factor comprises calculating the correction coefficient based on a warpage coefficient, which is based on a reference substrate having a known warpage amount, and a warpage amount of the target substrate;
- generating a corrected image of the target substrate by correcting the surface image of the target substrate using the correction coefficient;
- obtaining a warpage amount of the reference substrate;
- obtaining a surface image of the reference substrate;
- and
- calculating the warpage coefficient based on the warpage amount of the reference substrate and the surface image of the reference substrate,
- wherein obtaining the information on the deformation factor of the surface comprises obtaining the warpage amount of the target substrate, and
- wherein calculating the warpage coefficient comprises:
- generating normalized data including a normalized brightness value of each pixel of the surface image of the reference substrate based on a brightness value of a central region in the surface image of the reference substrate;
- and
- calculating the warpage coefficient based on the warpage amount of the reference substrate and the normalized data.
10 more elements
Dependencies are inferred from the claim text.