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US 11,635,680 B2Granted
Overlay pattern
AssigneeChangxin Memory Technologies, Inc.
InventorMei-Li Wang
Life of this patent
Estimating the term…
Abstract
An overlay pattern includes a light-transmitting region and a first light-proof region. The first light-proof region and the light-transmitting region are arranged on a same plane, and an area of the first light-proof region is larger than an area of the light-transmitting region. An orthographic projection of the first light-proof region on the plane and an orthographic projection of the light-transmitting region on the plane do not overlap and form a first rectangular region.
Claims16
An overlay pattern, comprising:
- a light-transmitting region;
- and
- a first light-proof region, wherein the first light-proof region and the light-transmitting region are arranged on a same plane, and an area of the first light-proof region is larger than an area of the light-transmitting region,
- wherein an orthographic projection of the first light-proof region on the plane and an orthographic projection of the light-transmitting region on the plane do not overlap and form a first rectangular region;
- wherein the first light-proof region comprises:
- a first sub-rectangular region, arranged in a middle of the first rectangular region, wherein each side of the first sub-rectangular region is perpendicular to two opposite sides of the first rectangular region and parallel to other two opposite sides of the first rectangular region;
- a plurality of second sub-rectangular regions, arranged at an interval and distributed on two opposite sides of the first sub-rectangular region along a first direction;
- and
- a plurality of third sub-rectangular regions, arranged at an interval and distributed on the two opposite sides of the first sub-rectangular region along a second direction, wherein the first direction is perpendicular to the second direction,
- wherein an extension direction of the plurality of the second sub-rectangular regions is parallel to an extension direction of the plurality of the third sub-rectangular regions.
7 more elements
Dependencies are inferred from the claim text.