Mirror-based microelectromechanical system for optical image stabilization

An apparatus comprising:

• a microelectromechanical system (MEMS) stationary frame configured to be electrically connected to a substrate;
• a MEMS platform electrically and rotationally coupled to the MEMS stationary frame and configured for rotational motion about one or more of a pitch axis or a yaw axis with respect to the MEMS stationary frame;
• one or more MEMS rotors provided between the MEMS stationary frame and the MEMS platform and configured to drive the rotational motion of the MEMS platform;
• one or more piezo films flexibly connected to the stationary frame and extending over the one or more MEMS rotors, the one or more piezo films configured to:
• have a first electrical resistance value when not deformed by the one or more MEMS rotors;
• have a second electrical resistance value when deformed by the one or more MEMS rotors, the second electrical resistance value varying based on an amount of deformation;
• and
• form a bridge circuit across the MEMS platform, the bridge circuit configured to produce an output voltage based on the first and second electrical resistance values;
• a MEMS mirror coupled to the MEMS platform and configured to reflect light rays to an image sensor of a camera that is communicatively connected to the substrate;
• and
• a microcontroller electrically connected to the MEMS platform and configured to:
• receive pitch and yaw orientation information of the camera, the pitch and yaw orientation information indicating a camera-pitch angle and a camera-yaw angle;
• access the output voltage;
• determine a mirror-pitch angle of the MEMS mirror and a mirror-yaw angle of the MEMS mirror, based on the output voltage;
• and
• control the rotational motion of the MEMS platform, using the MEMS rotors, to compensate for the camera-pitch angle and the camera-yaw angle and based on the mirror-pitch angle of the MEMS mirror and the mirror-yaw angle of the MEMS mirror.