Actuator, optical scanning device, and manufacturing methods
AssigneeMitsumi Electric Co., Ltd.
InventorKensuke Yamada
Life of this patent
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Abstract
An actuator includes a first driving beam that is connected to an object to be driven and includes multiple first beams extending in a direction orthogonal to a first predetermined axis, ends of each adjacent pair of the first beams being connected to each other via one of first turnaround parts such that the first driving beam forms a zig-zag bellows structure as a whole; first driving sources formed on first surfaces of the first beams; and ribs formed on second surfaces of the first beams at positions that are closer to the first predetermined axis than the first turnaround parts. The first driving sources are configured to move the first driving beam and thereby rotate the object around the first predetermined axis.
Claims26
An actuator, comprising:
- a frame;
- a first driving beam connected to the frame and an object to be driven, and includes multiple first beams extending in a direction orthogonal to a first predetermined axis, ends of each adjacent pair of the first beams being connected to each other via one of first turnaround parts such that the first driving beam forms a zig-zag bellows structure as a whole;
- first driving sources formed on first surfaces of the first beams;
- ribs formed on second surfaces of the first beams, a height of the ribs being same as a height of the frame;
- and
- a dicing tape to which the frame and the ribs are attached,
- wherein the first driving sources are configured to move the first driving beam and thereby rotate the object around the first predetermined axis,
- wherein the frame and the ribs include a plurality of laminated layers,
- wherein the first predetermined axis is a rotation axis of the object,
- wherein the ribs formed on the second surfaces of the respective first beams are each located closer to the rotation axis than a corresponding first turnaround part among the first turnaround parts, and
- wherein a surface of a given layer, of each of the frame and the ribs, among the plurality of laminated layers is attached to the dicing tape, and the surface of the given layer of each of the ribs has the same height as the surface of the given layer of the frame.
A method of manufacturing an actuator, the method comprising:
- patterning a silicon-on-insulator substrate to form an integrated substrate including multiple actuators, each of the actuators including
- a frame,
- a driving beam that is connected to the frame and to an object to be driven, and includes multiple beams extending in a direction orthogonal to a predetermined axis, ends of each adjacent pair of the beams being connected to each other via one of turnaround parts such that the driving beam forms a zig-zag bellows structure as a whole,
- driving sources formed on first surfaces of the beams, and
- ribs formed on second surfaces of the beams, a height of the ribs being same as a height of the frame, and the driving sources being configured to move the driving beam and thereby rotate the object around the predetermined axis,
- wherein the frame and the ribs include a plurality of laminated layers,
- wherein the first predetermined axis is a rotation axis of the object, and
- wherein the ribs formed on the respective second surfaces of the first beams are each located closer to the rotation axis than a corresponding first turnaround part among the first turnaround parts;
- attaching a dicing tape to a side of the integrated substrate on which the ribs are formed, wherein a surface of a given layer, of each of the frame and the ribs, among the plurality of laminated layers is attached to the dicing tape, and the surface of the given layer of each of the ribs has the same height as the surface of the given layer of the frame;
- dicing the integrated substrate to separate the actuators;
- and
- removing the separated actuators from the dicing tape.
Dependencies are inferred from the claim text.