Optical device
AssigneeHamamatsu Photonics K.K.
InventorsTatsuya Sugimoto, Tomofumi Suzuki, Kyosuke Kotani
Life of this patent
Estimating the term…
Loading patent…
AssigneeHamamatsu Photonics K.K.
InventorsTatsuya Sugimoto, Tomofumi Suzuki, Kyosuke Kotani
Estimating the term…
An optical device includes an elastic support portion which includes a torsion bar extending in a second direction perpendicular to a first direction and a nonlinearity relaxation spring connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A first comb finger of a first comb electrode and a second comb finger of a second comb electrode which are adjacent to each other face each other in the second direction.
An optical device comprising:
Dependencies are inferred from the claim text.