Measurement apparatus and measurement method using a laser and beat signals
AssigneeMitutoyo Corporation
InventorsHiroki Ujihara, Yoshimasa Suzuki, Shinichi Hara
Life of this patent
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AssigneeMitutoyo Corporation
InventorsHiroki Ujihara, Yoshimasa Suzuki, Shinichi Hara
Estimating the term…
A measurement apparatus, including: a laser apparatus that outputs a frequency-modulated laser beam with a plurality of modes; a branching part that branches the frequency-modulated laser beam into a reference light and a measurement light; a beat signal generation part that generates a plurality of beat signals by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured; a conversion part that converts the plurality of beat signals into digital signals by sampling the beat signals at a frequency greater than or equal to four times a resonator frequency of the laser resonator; and a calculation part that calculates a distance from the measurement apparatus to the object to be measured on the basis of the digital signals is provided.
A measurement apparatus for measuring a distance to an object to be measured, the measurement apparatus comprising:
A measurement method of a measurement apparatus for measuring a distance to an object to be measured, the method comprising:
A measurement apparatus for measuring a distance to an object to be measured, the measurement apparatus comprising:
Dependencies are inferred from the claim text.