Analyzing apparatus, analysis method, and computer-readable medium

An analysis method of analyzing a terminal capacitance of a semiconductor device, the semiconductor device having a control terminal, a first main terminal and a second main terminal and being configured to control, with a voltage applied to the control terminal, a current flowing between the first main terminal and the second main terminal, the analysis method comprising:

• analyzing, by using a device simulator configured to simulate a transient change of a charge in the semiconductor device, a charge amount by analyzing a change of a charge amount at any one of the terminals when a power source voltage applied between the first main terminal and the second main terminal is changed by a displacement voltage smaller than an initial voltage after the current flowing between the first main terminal and the second main terminal is stabilized with the semiconductor device being set to an ON state and the power source voltage being set to the initial voltage;
• and
• calculating a capacitance by computing the terminal capacitance at any one of the terminals based on the change of the charge amount analyzed by the charge amount analyzing unit.

A non-transitory computer-readable medium having recorded thereon a program that, when executed by a computer, causes the computer to perform operations comprising:

• analyzing, by using a device simulator that is configured to simulate a transient change of a charge in a semiconductor device having a control terminal, a first main terminal and a second main terminal and being configured to control, with a voltage applied to the control terminal, a current flowing between the first main terminal and the second main terminal, a change of a charge amount at any one of the terminals when a power source voltage applied between the first main terminal and the second main terminal is changed by a displacement voltage smaller than an initial voltage after the current flowing between the first main terminal and the second main terminal is stabilized with the semiconductor device being set to an ON state and the power source voltage being set to the initial voltage;
• and
• computing a terminal capacitance of any one of the terminals of the semiconductor device based on the analyzed change of the charge amount.