Device for inspecting large area high speed object

An inspection apparatus for a high speed and a large area, the high-speed device comprising:

• a terahertz wave generation portion configured to generate a terahertz wave;
• a ring beam forming portion configured to form a ring beam by using the terahertz wave incident from the terahertz wave generation portion;
• a polygon mirror having a plurality of reflection surfaces tilted at different angles, respectively, and configured to rotate to change a path of the ring beam reflected by the plurality of reflection surfaces to form a first line beam on an inspection target object;
• a first moving portion mechanically coupled to the polygon mirror and configured to move the polygon mirror to change the path of the ring beam reflected by the plurality of reflection surfaces to form a second line beam on the inspection target object, in a direction different from that of the first line beam;
• a second lens configured to allow the ring beam reflected by the polygon mirror to be focused on the inspection target object;
• a path changing portion disposed between the ring beam forming portion and the polygon mirror and configured to change a path of a reflection ring beam reflected from the inspection target object, incident on the polygon mirror, and reflected and incident from the polygon mirror;
• a third lens disposed so as to be spaced apart from the path changing portion and configured to collect the reflection ring beam of which the path is changed by the path changing portion;
• a detector configured to detect the reflection ring beam collected by the third lens;
• and
• the ring beam forming portion includes:
• a first axicon mirror forming a ring beam by reflecting the terahertz wave incident from the terahertz wave generation portion;
• and
• a second axicon mirror reflecting the ring beam reflected from the first axicon mirror toward the rotary mirror.