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US 11,635,369 B1Granted
Miniature FT-MIR using a MEMS interferometer with a metasurface emitter and detector
AssigneeSaudi Arabian Oil Company
InventorDwight W. Swett
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Abstract
A miniature Fourier transform mid-infrared (FT-MIR) spectrometer is provided. The FT-MIR includes a metasurface IR source to emit radiation when heated, a microelectromechanical (MEMS) interferometer, and a metasurface microbolometer to measure an interferogram from the MEMS interferometer, wherein the miniature FT-MIR spectrometer is less than about 20 mm in outer diameter.
Claims30
A miniature Fourier transform mid-infrared (FT-MIR) spectrometer, comprising:
- a metasurface IR source to emit radiation when heated;
- a microelectromechanical (MEMS) interferometer;
- and
- a metasurface microbolometer to measure an interferogram from the MEMS interferometer, wherein the miniature FT-MIR spectrometer is less than about 20 mm in outer diameter.
1 more element
Dependencies are inferred from the claim text.