System for reducing friction-induced wear of pipe
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo Yao Li, Shao Chang Tu, Tsung-Ying Wu, Wei Chih Lin
Life of this patent
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Abstract
A buffer for holding a pipe adapted to transport a fluid is provided. The buffer includes a base, a plurality of fingers extending outwardly from a first side of the base. A first finger of the plurality of fingers and a second finger of the plurality of fingers define a cavity for receiving the pipe. The buffer further includes at least one roller on a second side of the base opposite the first side.
Claims20
A buffer for holding a pipe adapted to transport a fluid, comprising:
- a base;
- a plurality of fingers extending outwardly from a first side of the base, wherein a first finger of the plurality of fingers and a second finger of the plurality of fingers define a cavity for receiving the pipe, the second finger comprises a ridge protruding from a surface of the second finger, the ridge protrudes toward the first finger, the ridge protrudes toward the first finger, the first finger extends outwardly from a first end of the base, and the second finger extends outwardly from a central portion of the base, and a third finger of plurality of fingers extends outwardly from a second end of the base opposite the first end, wherein the second finger is between the first finger and the third finger;
- and
- at least one roller on a second side of the base opposite the first side.
An arrangement in a semiconductor fabrication facility, comprising:
- a semiconductor processing system comprising a processing chamber;
- a fluid supply system comprising a pipe connected to the processing chamber and configured to transport a fluid;
- a power supply comprising an electrical cable connected to processing chamber;
- a buffer placed on a support plate and adapted to elevate the pipe and the electrical cable from the support plate, the buffer comprising:
- a base,
- a plurality of fingers on a first side of the base, wherein the plurality of fingers comprises a first finger extending outwardly from a first end of the base, a second finger extending outwardly from a central portion of the base, and a third finger extending outwardly from a second end of the base opposite the first end, wherein the first finger and the second finger define a first cavity for receiving the pipe, and the second finger and the third finger define a second cavity for receiving the electrical cable, and
- a roller on a second side of the base opposite the first side and contacting the support plate;
- and
- an acoustic sensor adapted to detect acoustic waves generated by the roller.
A buffer for holding a pipe adapted to transport a fluid, comprising:
- a base;
- a plurality of fingers extending outwardly from a first side of the base, wherein a first finger of the plurality of fingers and a second finger of the plurality of fingers define a first cavity for receiving the pipe, the second finger and a third finger of the plurality of fingers define a second cavity for receiving an electrical cable, and a shape of the second cavity is different from a shape of the first cavity;
- and
- at least one roller on a second side of the base opposite the first side.
Dependencies are inferred from the claim text.