Portable optic metrology thermal chamber module and method therefor
AssigneeOptikos Corporation
InventorDavid Imrie
Life of this patent
Estimating the term…
Loading patent…
AssigneeOptikos Corporation
InventorDavid Imrie
Estimating the term…
A portable optic metrology thermal chamber module including a housing defining a thermal chamber, with a thermally isolated environment arranged for holding an optic device under test, the housing having an optic stimulus entry aperture configured for entry of a stimulus beam, from a metrology system stimulus source through the entry aperture onto an entry pupil of the device to an image analyzer, and a module mount coupling to modularly mount the portable optic metrology thermal chamber module to a support of a metrology system of the metrology system stimulus source so as to removably couple the portable optic metrology thermal chamber module as a unit to the support in a predetermined position relative to the metrology system stimulus source, and the housing is sized and shaped so that the portable optic metrology thermal chamber module is portable as a unit for moving to and removing from the predetermined position.
A portable optic metrology thermal chamber module comprising:
Dependencies are inferred from the claim text.