Workpiece holder for utilization in metrology system for measuring workpiece in different orientations

A computer-implemented method for operating a metrology system including a sensing configuration for obtaining 3-dimensional surface data for a workpiece that is held in a workpiece holder, the computer-implemented method comprising:

• under control of one or more computing systems configured with executable instructions,
• operating the sensing configuration of the metrology system to obtain 3-dimensional reference feature data for determining first 3-dimensional positions of at least three reference features of the workpiece holder while the workpiece holder is in a first orientation;
• operating the sensing configuration to obtain first 3-dimensional surface data for a first side of a workpiece that is held in the workpiece holder while the workpiece holder is in the first orientation;
• operating a rotary portion to rotate the workpiece holder to be in a second orientation;
• operating the sensing configuration to obtain 3-dimensional reference feature data for determining second 3-dimensional positions of the at least three reference features while the workpiece holder is in the second orientation;
• operating the sensing configuration to obtain second 3-dimensional surface data for a second side of the workpiece that is held in the workpiece holder while the workpiece holder is in the second orientation;
• and
• utilizing the determined first and second 3-dimensional positions of the at least three reference features for combining the first 3-dimensional surface data for the workpiece with the second 3-dimensional surface data for the workpiece.

A workpiece holding configuration for utilization in a metrology system which includes a sensing configuration that is utilized for obtaining 3-dimensional surface data for a workpiece, the workpiece holding configuration comprising:

• a workpiece holder comprising:
• a workpiece holding portion comprising a plurality of workpiece engaging portions, wherein each workpiece engaging portion is configured to engage a portion of the workpiece to securely hold the workpiece in the workpiece holder;
• and
• at least three reference features that are each configured to be sensed by the sensing configuration of the metrology system both when the workpiece holder is in a first orientation and when the workpiece holder is rotated to be in a second orientation, wherein:
• in the first orientation, the sensing of the at least three reference features by the sensing configuration enables first 3-dimensional positions of the at least three reference features to be determined;
• in the first orientation, a first side of a workpiece that is held by the workpiece holder is oriented so as to enable the sensing configuration to obtain first 3-dimensional surface data for a first surface on the first side of the workpiece;
• in the second orientation, the sensing of the at least three reference features by the sensing configuration enables second 3-dimensional positions of the at least three reference features to be determined;
• in the second orientation, a second side of the workpiece that is held by the workpiece holder is oriented so as to enable the sensing configuration to obtain second 3-dimensional surface data for a second surface on the second side of the workpiece;
• and
• the determined first and second 3-dimensional positions of the at least three reference features enables the first 3-dimensional surface data for the workpiece to be combined with the second 3-dimensional surface data for the workpiece;
• and
• a rotary portion configured to rotate the workpiece holder between different orientations, including rotating the workpiece holder from the first orientation to the second orientation.