Optical module
AssigneeHamamatsu Photonics K.K.
InventorsTomofumi Suzuki, Kyosuke Kotani, Tatsuya Sugimoto
Life of this patent
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Abstract
An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.
Claims7
A mirror unit comprising:
- a base which includes a first main surface and a second main surface opposite each other;
- a movable mirror which includes a mirror surface following a plane parallel to the first main surface and is supported by the base so as to be movable along a first direction perpendicular to the first main surface;
- a drive unit which includes at least a portion connected to the base and the movable mirror, and moves the movable mirror along the first direction;
- a first member which includes a first surface fixed to the first main surface and a first recess formed on the first surface so as to correspond to the movable mirror and the drive unit;
- and
- a second member which includes a second surface fixed to the second main surface and a second recess formed on the second surface so as to correspond to the movable mirror and the drive unit.
Dependencies are inferred from the claim text.