Electrostatically actuated device

An electrostatically actuated electrocaloric cooling device, comprising:

• a first substrate defining a smooth surface;
• a first substrate electrode forming a layer on the smooth surface of the first substrate;
• a second substrate defining a smooth surface;
• a second substrate electrode forming a layer on the smooth surface of the second substrate;
• a flexible electrocaloric stack including two layers comprising polymers and three flexible electrode layers, the flexible electrocaloric stack overlaying the first substrate electrode or the second substrate electrode depending on a voltage differential applied between the first substrate electrode, the second substrate electrode, and the flexible electrode layer, the flexible electrocaloric stack further including:
• a first fixed portion attached to an underlying surface of the first substrate,
• a second fixed portion attached to an underlying surface of the second substrate, and
• a movable portion that is movable with respect to the first substrate electrode and the second substrate electrode,
• a first semi-insulator separating the first substrate electrode from the flexible electrocaloric stack and having a bulk electrical resistivity greater than 107 Ωcm but less than 1013 Ωcm;
• and
• a second semi-insulator separating the second substrate electrode from the flexible electrocaloric stack and having a bulk electrical resistivity greater than 107 Ωcm but less than 1013 Ωcm;
• and
• a voltage source, wherein an application of a voltage differential between the flexible electrode layer and the first substrate electrode or the second substrate electrode creates an electrostatic force moving the movable portion to attach the movable portion to the first substrate or the second substrate;
• and
• wherein:
• an application of a voltage differential on said flexible electrocaloric stack creates a temperature difference absorbing heat from said first substrate and transferring the heat to said second substrate, and
• a major portion of the first semi-insulator and the second semi-insulator comprises a polymer.

An electrocaloric cooling device, comprising:

• a first substrate electrode;
• a first semi-insulator layer on the first substrate electrode and having a bulk electrical resistivity greater than 107 Ωcm but less than 1013 Ωcm;
• a second substrate electrode;
• a second semi-insulator layer having a bulk electrical resistivity greater than 107 Ωcm but less than 1013 Ωcm but less than 1013 Ωcm;
• and
• a flexible membrane comprising a flexible electrode moving between a first physical contact with the first semi-insulator layer and a second physical contact with the second semi-insulator layer in response to a voltage differential applied between the flexible electrode, the second substrate electrode, and the first substrate electrode.