Half-angle nozzle
AssigneeApplied Materials, Inc.
InventorEric Kihara Shono
Life of this patent
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Abstract
Embodiments of the present disclosure provide apparatuses for improving gas distribution during thermal processing. In one or more embodiments, an apparatus includes a body, an angled gas source assembly, and a gas injection channel. The gas injection channel has a first half-angle and a second half-angle. The first half-angle is different from the second half-angle. The use of an improved side gas assembly in a processing chamber to direct gas from the center toward the edge of the substrate advantageously controls growth uniformity throughout the substrate. Surprisingly, directing gas through a gas channel with non-uniform half-angles will significantly increase the reaction at or near the edge of the substrate, thereby leading to an improved overall thickness uniformity of the substrate.
Claims20
A gas injector adapted to be used with a processing chamber for thermally processing a substrate, comprising:
- a body having a channel configured to conduct a gas to the processing chamber, wherein a central axis extends through and substantially bisects the channel of the body;
- and
- a projection extending from the body, wherein the projection is triangular and has a channel configured to conduct the gas to the channel of the body;
- wherein the channel of the projection includes sidewalls arranged at an angle relative to the central axis;
- and
- wherein the channel of the projection further comprises:
- a first interior surface;
- a second interior surface opposite the first interior surface;
- a first half-angle measured between the first interior surface and the central axis;
- and
- a second half-angle measured between the second interior surface and the central axis, wherein the first half-angle is different from the second half-angle.
An gas injector for thermal processing a substrate, comprising:
- a body;
- a projection connected to the body, wherein the projection is triangular;
- and
- a gas injection channel formed in the body, the gas injection channel comprising:
- a first interior surface;
- a second interior surface opposite the first interior surface;
- a first half-angle measured between the first interior surface and a central axis of the gas injection channel;
- and
- a second half-angle measured between the second interior surface and the central axis, wherein the first half-angle is different from the second half-angle.
A gas injector adapted to be used with a processing chamber for thermally processing a substrate, comprising:
- a body having a channel configured to conduct a gas to the processing chamber, wherein a central axis extends through and substantially bisects the channel of the body, and wherein the body further comprises:
- a first side;
- a second side opposite the first side, wherein the first side is substantially the same length as the second side;
- a third side orthogonal to the first side;
- a first curved surface extending between the first side and the third side;
- a second curved surface extending between the third side and the second side;
- a fourth side orthogonal to the second side;
- a third curved surface extending between the first side and the fourth side;
- a fourth curved surface extending between the fourth side and the second side, wherein the third side is opposite the fourth side;
- a fifth side orthogonal to the first side;
- and
- a sixth side orthogonal to the first side, wherein the sixth side is opposite the fifth side;
- and
- a projection extending from the body, the projection having a channel configured to conduct the gas to the channel of the body;
- wherein the channel of the projection includes sidewalls arranged at an angle relative to the central axis;
- and
- wherein the channel of the projection further comprises:
- a first interior surface;
- a second interior surface opposite the first interior surface;
- a first half-angle measured between the first interior surface and the central axis;
- and
- a second half-angle measured between the second interior surface and the central axis, wherein the first half-angle is different from the second half-angle.
Dependencies are inferred from the claim text.