Solid source sublimator

A solid source chemical sublimator, comprising:

• a housing comprising a proximal portion and a distal portion, the housing having a housing axis extending along a length of the housing, the distal portion configured to hold solid chemical reactant therein;
• a lid disposed on the proximal portion of the housing, the lid comprising a fluid inlet and a fluid outlet, the lid defining a serpentine flow path within a distal face of the lid, wherein the lid is adapted to allow gas flow within the flow path, the housing axis being perpendicular to a plane of the lid, wherein the inlet, the outlet, or both, comprises a corresponding filter configured to restrict particulate flow therethrough;
• a filter disposed below the serpentine flow path and above the proximal portion of the housing, the filter having a porosity configured to restrict a passage of the solid chemical reactant therethrough;
• and
• a resonator disposed in the distal portion of the housing, the resonator comprising extensions disposed radially around the housing axis, the resonator configured to agitate the solid chemical reactant in the housing.