Method for manufacturing semiconductor device, heat-curable resin composition, and dicing-die attach film
OwnerKazuhiro Yamamoto, Yui Kunito +1inventors
InventorsKazuhiro Yamamoto, Yui Kunito, Shunsuke Fujio
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OwnerKazuhiro Yamamoto, Yui Kunito +1inventors
InventorsKazuhiro Yamamoto, Yui Kunito, Shunsuke Fujio
Estimating the term…
A method for manufacturing a semiconductor device according to an aspect of the present disclosure includes a step of preparing a dicing/die-bonding integrated film including an adhesive layer formed of a heat-curable resin composition having a melt viscosity of 3100 Pa·s or higher at 120° C., a tacky adhesive layer, and a base material film; a step of sticking a surface on the adhesive layer side of the dicing/die-bonding integrated film and a semiconductor wafer together; a step of dicing the semiconductor wafer; a step of expanding the base material film and thereby obtaining adhesive-attached semiconductor elements; a step of picking up the adhesive-attached semiconductor element from the tacky adhesive layer; a step of laminating this semiconductor element to another semiconductor element, with the adhesive interposed therebetween; and a step of heat-curing the adhesive.
A method for manufacturing a semiconductor device, the method comprising:
A heat-curable resin composition used for a process for manufacturing a semiconductor device, having a melt viscosity of 3100 Pa·s or higher at 120° C., and having a storage modulus of 70 MPa or higher at 35° C.
A dicing/die-bonding integrated film, comprising:
Dependencies are inferred from the claim text.