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US 11,633,804 B2Granted
Laser processing apparatus and laser processing method
AssigneeDisco Corporation
InventorSetsuo Yamamoto
Life of this patent
Estimating the term…
Abstract
A laser processing apparatus includes: a chuck table for holding a single-crystal SiC ingot on a holding surface thereof; a laser beam applying unit for applying a laser beam to the single-crystal SiC ingot held on the holding surface of the chuck table; and a camera unit configured to capture an image of the single-crystal SiC ingot held on the holding surface of the chuck table. The chuck table includes a porous material making up the holding surface and a glass frame made of a non-porous material and having a recess defined therein and receiving the porous material fitted therein, and a negative pressure transfer path for transferring a negative pressure to the porous material fitted in the recess.
Claims18
A laser processing apparatus comprising:
- a chuck table for holding a workpiece on a holding surface thereof;
- a laser beam applying unit configured to apply a laser beam to the workpiece held on the holding surface of said chuck table;
- a camera unit configured to capture an image of the workpiece held on the holding surface of said chuck table;
- wherein said chuck table includes:
- a porous material making up said holding surface;
- and
- a glass frame made of a non-porous material and having a recess defined therein for receiving said porous material fitted therein, said glass frame having a negative pressure transfer path in the center of said recess for transferring a negative pressure to the porous material fitted in said recess, said negative pressure transfer path including a transfer hole that extends through a bottom surface of said glass frame and is coupled to a vacuum suction source;
- and
- a rotating unit attached directly to a bottom surface of said glass frame, said rotating unit configured to rotate said glass frame and said holding surface about a central vertical axis.
6 more elements
A laser processing apparatus comprising:
- a chuck table for holding a workpiece on a holding surface thereof;
- a laser beam applying unit configured to apply a laser beam to the workpiece held on the holding surface of said chuck table;
- and
- a camera unit configured to capture an image of the workpiece held on the holding surface of said chuck table;
- wherein said chuck table includes:
- a porous material making up said holding surface and provided as a porous glass plate;
- a glass frame made of a non-porous material and having a recess defined therein for receiving said porous material fitted therein, and a negative pressure transfer path for transferring a negative pressure to the porous material fitted in said recess;
- and
- a rotating unit attached directly to a bottom surface of said glass frame, and configured to rotate said holding surface about a central vertical axis,
- wherein the workpiece held on said chuck table has an outer peripheral edge portion supported on said glass frame in covering relation to said porous glass plate, said glass frame has an outer peripheral portion protruding radially outward from the outer peripheral edge portion of the workpiece, an upper surface of the outer peripheral portion is flush with said holding surface, and said glass frame transmits therethrough illuminating light emitted by said camera unit.
7 more elements
A laser processing apparatus comprising:
- a chuck table for holding a workpiece on a holding surface thereof;
- a laser beam applying unit configured to apply a laser beam to the workpiece held on the holding surface of said chuck table;
- a camera unit configured to capture an image of the workpiece held on the holding surface of said chuck table;
- and
- a rotating unit for rotating the chuck table about its central axis;
- wherein said chuck table includes:
- a porous material making up said holding surface and provided as a porous glass plate;
- and
- a glass frame made of a non-porous material and having a recess defined therein for receiving said porous material fitted therein, and a negative pressure transfer path for transferring a negative pressure to the porous material fitted in said recess, said rotating unit attached directly to a bottom surface of said glass frame, and configured to rotate said holding surface about a central vertical axis,
- wherein the workpiece held on said chuck table has an outer peripheral edge portion supported on said glass frame in covering relation to said porous glass plate, said glass frame has an inner portion radially inward from an outer peripheral edge of said recess, the rotating unit supports a bottom surface of the inner portion, and said glass frame transmits therethrough illuminating light emitted by said camera unit.
7 more elements
Dependencies are inferred from the claim text.