US 11,631,759 B2Granted

Electrostatic discharge protection devices and methods for fabricating electrostatic discharge protection devices

AssigneeGlobalFoundries U.S. Inc.

InventorsMeng Miao, Alain François Loiseau, Souvick Mitra, Robert John Gauthier, Jr., You Li, Wei Liang

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Abstract

An ESD protection device may be provided, including: a substrate including a first conductivity region and a second conductivity region arranged therein. The first conductivity region may include a first terminal region and a second terminal region electrically coupled with each other. The second conductivity region may include a third terminal region and a fourth terminal region electrically coupled with each other. The second conductivity region may further include a fifth terminal region electrically coupled with the first and second terminal regions. The fifth terminal region may be arranged laterally between the third terminal region and the fourth terminal region. The first conductivity region, the first terminal region, the third terminal region, and the fifth terminal region may have a first conductivity type. The second conductivity region, the second terminal region, and the fourth terminal region may have a second conductivity type different from the first conductivity type.

Claims20

Dependent claims

An electrostatic discharge (ESD) protection device comprising:

a substrate comprising a first conductivity region and a second conductivity region arranged laterally adjacent to each other and are joined to each other;
wherein the first conductivity region comprises a first terminal region and a second terminal region electrically coupled with each other and a first conductive pad;
wherein the second conductivity region comprises a third terminal region and a fourth terminal region electrically coupled with each other and a second conductive pad;
wherein the second conductivity region further comprises:
a fifth terminal region arranged laterally between the third terminal region and the fourth terminal region, and electrically coupled with the first terminal region, the second terminal region and the first conductive pad;
and
an insulation element arranged laterally between the third terminal region and the fifth terminal region,
wherein the first conductivity region, the first terminal region, the third terminal region, and the fifth terminal region have a first conductivity type;
and wherein the second conductivity region, the second terminal region, and the fourth terminal region have a second conductivity type different from the first conductivity type,
wherein the first conductivity type is selected from N-type or P-type, and the second conductivity type is selected from N-type or P-type,
wherein either:
a portion of the second conductivity region is arranged laterally between the fourth terminal region and the fifth terminal region to form a P-N junction between the fifth terminal region and the second conductivity region;
or
(ii) the fifth terminal region and the fourth terminal region are arranged alongside each other and join each other to form a P-N junction between the fifth terminal region and the fourth terminal region.

11 more elements

Dependencies are inferred from the claim text.