Control system and non-transitory computer readable recording medium

A non-transitory computer readable recording medium storing a control program for realizing a control device of a control system, the control system comprising:

• a control object, executing a predetermined processing on a surface of an object;
• a measurement sensor, measuring a distance to a measurement point on the surface of the object;
• a plurality of drive devices, for changing a relative positional relationship between the object and the control object;
• and
• the control device, outputting an operation amount to the plurality of drive devices every control cycle, wherein
• the plurality of drive devices comprise:
• a first drive device, for moving the control object relative to the object along a target trajectory on a plane facing the surface of the object, and
• a second drive device, for moving the control object relative to the object along an orthogonal axis orthogonal to the plane;
• the measurement sensor is integrated with the control object so that the measurement point is located in a position separated by a predetermined distance along the target trajectory from a processing object point on the surface of the object to be subjected to the predetermined processing by the control object;
• wherein the control program causes a computer to execute:
• generating a first command position of the control object on the plane in each control cycle based on the target trajectory;
• generating a first operation amount output to the first drive device by model predictive control using a first dynamic characteristic model showing a relationship between the first operation amount and a position of the control object on the plane and the first command position;
• generating a second command position of the control object on the orthogonal axis in each control cycle;
• and
• generating a second operation amount output to the second drive device by model predictive control using a second dynamic characteristic model showing a relationship between the second operation amount and a position of the control object on the orthogonal axis and the second command position, wherein
• generating the second command position comprises, based on a measurement result of the measurement sensor and the first command position, generating the second command position so that a distance between the control object and the surface of the object is constant.