Adiabatic optical switch using a waveguide on a MEMS cantilever

An optical switching device, comprising:

• a substrate;
• first and second optical waveguides having respective first and second tapered ends, which are fixed on the substrate in mutual proximity one to another;
• a pair of electrodes disposed on the substrate with a gap therebetween;
• a cantilever beam disposed on the substrate within the gap and configured to deflect transversely between first and second positions within the gap in response to a potential applied between the electrodes;
• a third optical waveguide mounted on the cantilever beam and having a third tapered end disposed between the first and second tapered ends of the first and second waveguides, so that the third tapered end is in proximity with the first tapered end so that optical radiation is transferred adiabatically between the third tapered end and the first tapered end when the cantilever beam is in the first position and is in proximity with the second tapered end so that optical radiation is transferred adiabatically between the third tapered end and the second tapered end when the cantilever beam is in the second position,
• wherein the third waveguide does not make physical contact with either of the first and second waveguides;
• and
• a controller, which is coupled to apply the potential to the electrodes with voltages that vary so as to switch the cantilever beam between the first and second positions, thereby switching a path of the optical radiation between the first and second optical waveguides.