Radiation detector, radiographic imaging device, and manufacturing method
AssigneeFUJIFILM Corporation
InventorsMunetaka Kato, Shinichi Ushikura, Yoshihiro Okada, Keiichi Akamatsu, Haruyasu Nakatsugawa
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Abstract
A radiation detector including: a substrate formed with a plural pixels in pixel region of a flexible base member, the plural pixels accumulates charges generated in response to light converted from radiation; a conversion layer provided at a surface to which the pixel region is provided on the base member, the conversion layer converts the radiation into light; and a reinforcement substrate provided at a surface of the conversion layer that faces a surface of the substrate side, the reinforcement substrate contains a material having a yield point and has a higher rigidity than the base member.
Claims20
A radiation detector comprising:
- a substrate formed with a plurality of pixels in a pixel region of a flexible base member, the plurality of pixels accumulates charges generated in response to light converted from radiation;
- a conversion layer provided at a surface to which the pixel region is provided on the base member, the conversion layer converts the radiation into light;
- and
- a reinforcement substrate provided at a surface of the conversion layer that opposes a first surface of the conversion layer to which the substrate is provided, the reinforcement substrate contains a material having a yield point and has a higher rigidity than the base member.
A manufacturing method for a radiation detector, comprising:
- a process of coating an adhesion layer onto a reinforcement substrate having a size according to the size of a radiation detector;
- a process of forming a substrate by providing a flexible base member to a support body with a separation layer interposed between the base member and the support body, and providing a plurality of pixels in a pixel region of the base member, the plurality of pixels accumulates charges generated in response to light converted from radiation;
- a process of forming a conversion layer that converts the radiation into light at a surface to which the pixel region of the base member is provided;
- a process of affixing a reinforcement substrate at a surface of the conversion layer that opposes a first surface of the conversion layer to which the substrate is provided, the reinforcement substrate containing a material having a yield point and having a higher rigidity than the base member;
- and
- a process of separating the substrate provided with the conversion layer and the reinforcement substrate from the support body.
Dependencies are inferred from the claim text.